| 摘要 |
<p>The relative pressure sensor described consists of a support plate 31 on which there are mounted on both sides, on the one hand in order to form a measurement chamber 30 and, on the other hand in order to form a reference pressure chamber 40 elastically deformable diaphragms 32 and 42. The diaphragms are connected in a gas-tight fashion in the edge region via sealing spacer rings 33 and 43 to the support plate 31. The chambers 30 and 40 are connected to one another via a bore 34 in the support plate 31. Via a sealable transverse bore 35, the chambers can be evacuated and filled with a neutral gas. The process pressure Pp of a medium to be monitored acts on the diaphragm 32, and a known reference pressure PRef acts on the diaphragm 42. The diaphragms 32 and 42 are connected by transducers which convert the mechanical deflection into electrical signals. These electrical signals are fed to an electrical circuit 45 which generates an output signal that is proportional to the relative pressure, that is to say the difference between the process and reference pressures.</p> |
