ACCELERATION SENSOR.

摘要

The proposal is for an acceleration sensor consisting of an upper plate (1), a central plate (2) and a lower plate (3). The sensor has a movable electrode (4) built out from the central plate (2). The assembly of the plates is simplified by the use of a closed dielectric layer (10) on the upper plate (1) and the lower plate (3) since the plates do not have to be mutually adjusted. The use of stops (17) prevents the jamming of the seismic mass (33) on the upper (1) or lower plate (3). The use of local oxidation (18) reduces the stray capacitance.