| 摘要 |
PURPOSE:To exchange a mask with a piezoelectric element mounted thereby enabling the deposition and polarization of an electrode to be done by equipping it with an element base for mounting a piezoelectric element on a base capably in vertical shifting and a mask capable of exchange for forming the electrode. CONSTITUTION:The pin part 3a of an element base 3 is incorporated in a guide hole 11a, and the element base 3 is pressed upward by a coil spring 12. A piezoelectric element 10 is set on the clement base, and a mask 6 is put between a mask upper plate 5 and a mask lower plate 4, and those are fixed onto a regulating frame 2. In this condition, an electrode pattern is formed on the top of the piezoelectric element, and a spring 22, the upper plate 5, the lower plate 4, and the mask 6 are removed. The piezoelectric element may be inverted, and also it becomes possible even to incorporate a new mask and again deposit an electrode in other shape. |
