| 摘要 |
<p>PURPOSE:To prevent contact damages and surface roughening of a bonding pad surface due to the contact of a probe needle. CONSTITUTION:A probe pad 6, to which a probe needle for probe inspection comes into contact and which is electrically connected to a bonding pad 4, is formed separately from the bonding pad 4. By doing this, a probe test can be performed by bringing the probe needle into contact with the probe pad 6, so that the bonding pad 4 will not contact the probe needle, thereby preventing the roughening of the surface of the bonding pad 4 and contact damages.</p> |
