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发明名称
WASHING APPARATUS USING WASHING SOLUTION
摘要
申请公布号
JPH07108233(A)
申请公布日期
1995.04.25
申请号
JP19930255399
申请日期
1993.10.13
申请人
IWATANI INTERNATL CORP;NIPPON STEEL CORP;KURARAY CO LTD;KURARAY CHEM CORP
发明人
IRIE MITSUNORI;SAWA HIROYUKI
分类号
B08B3/10;B01D53/22;H01L21/304;(IPC1-7):B08B3/10
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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