| 摘要 |
PURPOSE:To obtain a three-dimensional acceleration sensor unit having an excellent detecting sensitivity, being free from erroneous recognition of the polarity of acceleration, requiring few numbers of assembling processes, having a simple structure and further being little affected by heat. CONSTITUTION:The three-dimensional acceleration sensor unit comprises a silicon base 2 formed out of three areas of a functioning part 11, a flexible part 12 formed around this functioning part 11 and fixed part 13 formed around this flexible part 12, a weight body 20 joined to the functioning part 11, a resistance element for detection of acceleration provided for the flexible part 12, a first control base 1 made of silicon which regulates the amount of vertical movement of the functioning part 11, and a second control base 3 made of silicon which regulates the amounts of vertical and lateral movements of the weight body 20 provided for the functioning part 11. The bases 1, 2 and 3 are joined respectively by eutectic bonding of gold and silicon. |
