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经营范围
发明名称
METHOD OF FORMATION OF WIRING
摘要
申请公布号
JPH07111265(A)
申请公布日期
1995.04.25
申请号
JP19930255345
申请日期
1993.10.13
申请人
SONY CORP
发明人
KAWASHITA NOBUTAKA
分类号
H01L21/3213;H01L21/3205;H01L23/52;(IPC1-7):H01L21/321;H01L21/320
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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