| 摘要 |
PURPOSE:To produce an easily crushable high-quality silicon nitride powder at a low cost without necessitating time-consuming or particular disintegration and crushing processes or troublesome post-treatments such as wet-purification treatment. CONSTITUTION:A nitride raw material containing metallic silicon powder and having an oxygen content of 0.2-0.5wt.% is agglomerated to a bulk density of <=1g/cm<3> and nitrided under the following reaction conditions (1) to (3). (1) The reaction rate is <=4%/hr, (2) the reaction rate at the nitriding ratio of 10-90% is >=0.5%/hr and (3) the increment of the reaction rate at a nitriding ratio of <50% is <=0.6%/hr<2>. |
