摘要 |
PURPOSE:To make the capacitance higher without increasing the occupied area of a semiconductor chip and also without increasing the size of an element. CONSTITUTION:The title semiconductor capacitor has a multilayer capacitor structure in which the first capacitor insulating film 5, provided on the first conductive film 3, and the second capacitor insulating film 6, provided on the second conductive film 4 formed on the insulating film 5, are pinched by the first conductive film 3 on the lower side, the electrode 8 on the upper part and the second conductive film 4 in the middle part. |