| 摘要 |
<p>PURPOSE:To facilitate the highly accurate timing control to change the supply sate of a specific gas which is made to flow in accordance with the opening/ closing states of a plurality of gas pressure operating valves which respond to a plurality of solenoid valves operated time-sequentially. CONSTITUTION:A plurality of gas tubes 9a-9c are connected between the respective valve unit parts 4ao-4eo of a plurality of solenoid valves 4A-4E and the respective driving parts 8ai-8ei of a plurality of gas pressure operating valves 8A-8E to drive the respective driving parts 8ai-8ei. The respective inner capacities of the gas tubes 9a-9c are determined in accordance with the operating times of the respective gas pressure operating valves 8A-8E. Therefore, when a gas supply state is switched from the supply state of one specific gas to the supply state of another specific gas, the supply state in which both gases are mixed can be avoided, so that the timing of the changeover can be controlled with a high accuracy.</p> |
