| 摘要 |
PURPOSE:To accelerate the supply of undischarged laser gas and furthermore to increase laser ray in pulse repetition frequency by a method wherein laser gas is enhanced in flow rate in a discharge space. CONSTITUTION:Peaking capacitors 112 are housed in an insulating tube 114 disposed in a gas laser tube 100, and a pair of main discharge electrodes 120 and 122, a pair of pre-ionizing electrodes 142 and 144, the insulating tube 114, the fan 154, and cooling means 108 and 110 are so arranged as to enable a flow of laser gas produced by a fan 154 to circulate traversing a discharge space S. Furthermore, members which impede a flow of laser gas are removed from a flow path between the fan and the discharge space so as to introduce most of a flow of laser gas generated by a fan into the discharge space. |
