Semiconductor processor liquid spray system with additive blending

摘要

A semiconductor processor blending system for diluting a concentrated liquid additive into an actively flowing primary liquid. The concentrated additive is stored in a reservoir and transferred to a drained mixing tank via a metering pump. A diluent supply adds a measured amount of diluent to the mixing tank to provide a diluted additive. Primary fluid flows through aspirator-injectors having a suction port which draws from the mixing tank. This provides two-stage dilution which can easily achieve very dilute ratios of the additive.