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发明名称
IMPURITY IMPLANTATION METHOD FOR SILICON THIN FILM TRANSISTOR
摘要
申请公布号
JPH07106587(A)
申请公布日期
1995.04.21
申请号
JP19930245582
申请日期
1993.09.30
申请人
SANYO ELECTRIC CO LTD
发明人
TAKEUCHI MASARU
分类号
H01J37/317;H01L21/265;H01L21/268;H01L21/336;H01L29/78;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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