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发明名称
HEAT-TREATING EQUIPMENT
摘要
申请公布号
JPH07106262(A)
申请公布日期
1995.04.21
申请号
JP19930267917
申请日期
1993.09.30
申请人
TOKYO ELECTRON LTD
发明人
IKEDA TORU;IWATA TERUO
分类号
H01L21/205;H01L21/324;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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