| 摘要 |
<p>PURPOSE:To prevent erroneous operation due to erroneous setting of wafer by providing a base formed with a protruding detection member fitting to an application deciding recess made in the bottom face of the carrier. CONSTITUTION:The carrier 9 for containing a semiconductor wafer is provided with a recess 11 for deciding the application in the bottom face thereof. The carrier transfer system for sequentially transferring the carriers 9 mounted at predetermined positions has a base 10 formed with a protruding detection member 12 fitting to the recess made in the bottom face of the carrier 9. The shape of recess is differed depending on the application of the carriers 4, 9 and the protrusion 12 is set at such position as meshing the recess 11 of corresponding carrier. This constitution prevents erroneous operation due to erroneous setting.</p> |
