HEATING EQUIPMENT FOR VERTICAL FURNACE,申请号JP19930269706-传众专利搜索

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发明名称	HEATING EQUIPMENT FOR VERTICAL FURNACE
摘要
申请公布号	JPH07106269(A)	申请公布日期	1995.04.21
申请号	JP19930269706	申请日期	1993.10.01
申请人	KOKUSAI ELECTRIC CO LTD;KOKUSAI DENKI SYST SERVICE KK	发明人	ISHIZU HIDEO;HOSAKA EIJI;KANO RIICHI
分类号	H01L21/22;(IPC1-7):H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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