| 摘要 |
PURPOSE:To produce the optical device capable of constituting the optical wave guide element having stable characteristic without difference of specific dielectric constant between each layer. CONSTITUTION:This optical device 1 has a substrate 2 of sapphire (Al2O3), AlN film 3 formed on this substrate 2 and the diffused part (Ti-Al-N) 4 which is obtained by diffusing Ti (titanium) at the center part of this AlN film 3. The diffused part 4 of Ti-Al-N formed at the center part constitutes the optical waveguide because refractive index is related to Ti-Al-N>Al-N>Al2O3. The optical waveguide element uniform in EO (electro.optical) characteristic and surface acoustic wave propagating verocity and having a stable characteristic is obtained because the AlN film 3 and the diffused part 4 have the same crystal structure and specific dielectric constant. |
