| 摘要 |
<p>PURPOSE:To provide a electrostatic chucking electrode where the electrostatic attraction will not be degraded. CONSTITUTION:A mounting base 3 is attached in a vacuum container 1, and an electrostatic chuck 4 which attracts an object to be processed with an electrostatic force is fixed on that mounting base 3. This electrostatic chuck 3 consists of an electrode plate 7 made of a metal thin film, an upper insulation layer 10 and lower insulation layer 11 bonded to both sides of the electrode plate. A ceramic layer 12 is formed on the surface of the upper insulation layer 10.</p> |
