| 摘要 |
<p>PURPOSE:To provide a suction arm having no problem with access to wafers in a cassette. CONSTITUTION:A suction arm has an end 43 for supporting the center of a wafer 2, and the end has a thickness d' reduced so that it will not touch the bottom of a wafer cassette. The suction arm has a body 41 in which a suction hole 42 is formed corresponding to the periphery of a wafer. Consequently, a wafer is balanced on the end of the arm and held firmly on the periphery by suction. The end of the arm can be moved without touching a bottom plate in this state, so that the wafer is smoothly stored on the lowermost shelf.</p> |
