| 摘要 |
PURPOSE:To provide an apparatus for transferring wafers efficiently, while preventing air from whirling by simple means for blowing air under the wafer. CONSTITUTION:A wafer transfer apparatus 100 has a wafer holder 150 on which a wafer W to be transferred is placed. Under the apparatus, means for blow air is provided to prevent air from whirling under the wafer when there is a flow of air against its surface. For example, the means for blowing air comprises spouts 151-153 with slits 151a-153a formed in the reverse side of a flat hand, i.e., the wafer holder 150, which is connected with the distal end of a horizontal arm 140 that is expandable in the y-direction. The spouts, which are connected with a gas source, emit predetermined flows of clean air or nitrogen downward in given directions. |
