发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PURPOSE:To provide a semiconductor device having local wirings highly reliable and easy to form. CONSTITUTION:Over the main surface of a p type silicon substrate 1 formed are n type impurity regions 5b and 5c with a space in between. Over a region between the n type impurity regions 5c and 5b formed is a gate electrode 4b via a gate insulating film 3b. A titanium silicide layer 7 is formed extending from a surface layer of the gate electrode 4 to a surface layer part of the n type impurity region 5c. This titanium silicide layer 7 sewes as a local wiring. On the side wall of the gate electrode 4b where this titanium silicide layer 7 is not formed, a sidewall insulating film 6 remains.
申请公布号 JPH07106570(A) 申请公布日期 1995.04.21
申请号 JP19930249518 申请日期 1993.10.05
申请人 MITSUBISHI ELECTRIC CORP 发明人 ONO TAKIO
分类号 H01L21/28;H01L21/336;H01L21/768;H01L21/8234;H01L27/088;H01L27/11;H01L29/43;H01L29/78;(IPC1-7):H01L29/78;H01L21/823 主分类号 H01L21/28
代理机构 代理人
主权项
地址