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发明名称
ATOM LAYER ETCHING UNIT
摘要
申请公布号
JPH07106305(A)
申请公布日期
1995.04.21
申请号
JP19930250301
申请日期
1993.10.06
申请人
HITACHI LTD
发明人
ITABASHI NAOSHI;MOCHIJI KOZO;OCHIAI ISAO;YAMAMOTO SEIJI
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
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