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发明名称
FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07106429(A)
申请公布日期
1995.04.21
申请号
JP19930268369
申请日期
1993.09.30
申请人
NEC CORP
发明人
SUZUKI YOSHIHITO
分类号
H01L21/316;H01L21/027;H01L21/265;H01L21/266;H01L21/8238;H01L27/092;(IPC1-7):H01L21/823
主分类号
H01L21/316
代理机构
代理人
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