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发明名称
THIN FILM TRANSISTOR AND ITS MANUFACTURE
摘要
申请公布号
JPH07106574(A)
申请公布日期
1995.04.21
申请号
JP19930242814
申请日期
1993.09.29
申请人
MITSUBISHI ELECTRIC CORP
发明人
MAEKAWA SHIGETO
分类号
H01L29/78;H01L21/336;H01L29/49;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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