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发明名称
OPTISCH INTEGRIERTE, INTERFEROMETRISCHE MESSVORRICHTUNG.
摘要
申请公布号
DE69201726(D1)
申请公布日期
1995.04.20
申请号
DE1992601726
申请日期
1992.05.20
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE, PARIS, FR
发明人
GIDON, PIERRE, F-38130 ECHIROLLES, FR;VALETTE, SERGE, F-38100 GRENOBLE, FR
分类号
G01B9/02;G01B11/02;G01D5/26;G01J9/02;G01N21/45;(IPC1-7):G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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