RAMAN SPECTROSCOPIC ANALYSIS OF DAMAGES IN SEMICONDUCTORS
摘要
III-V semiconductor dot samples (particularly GaAs) have been studied with Raman microscopy. The samples were fabricated by electron beam lithography and dry etching. The non-resonant Raman scattering can provide direct information on the structure alteration and associated phonon bands. In particular, a previously unknown Raman line at 242cm<-1> is attributed to a non-allowed phonon caused by damage. Direct Raman imaging in this band can reveal the damaged portions of the sample.
申请公布号
WO9510768(A1)
申请公布日期
1995.04.20
申请号
WO1994GB02212
申请日期
1994.10.10
申请人
RENISHAW PLC;WANG, PEI, DONG;SOTOMAYOR TORRES, CLIVIA, MARFA;PITT, GILLIES, DAVID
发明人
WANG, PEI, DONG;SOTOMAYOR TORRES, CLIVIA, MARFA;PITT, GILLIES, DAVID