Reaction sintered ceramics and method of producing the same.

摘要

Si3N4 having a high thermal conductivity is produced from Si by a reaction sintering process. As a ceramic comprises Si, Y2O3, and Al2O3, the proportion of a sum weight of Al2O3 and Y2O3 to the total weight of the ceramic is 15% to 28% and the weight ratio of Y2O3 to Al2O3 is 3:1 to 10:1. The thermal conductivity of the ceramic is increased as compared with a conventional ceramic.