DETECTOR FOR FILM THICKNESS AND GROOVE DEPTH,申请号JP19930251362-传众专利搜索

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发明名称	DETECTOR FOR FILM THICKNESS AND GROOVE DEPTH
摘要
申请公布号	JPH07103717(A)	申请公布日期	1995.04.18
申请号	JP19930251362	申请日期	1993.10.07
申请人	HITACHI LTD	发明人	TOBA TAMAKI;HIYOSHI YASUO;OKAWA TAKAKO;FUJISAWA MASAYASU;HASHIMOTO ISAO
分类号	G01B11/02;G01B11/22;(IPC1-7):G01B11/02	主分类号	G01B11/02
代理机构		代理人
主权项
地址

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