| 摘要 |
PURPOSE:To provide a laser beam working device by which a stable laser beam can be oscillated and satisfactory working can be performed. CONSTITUTION:The optical axis of an excimer laser beam 2 oscillated by a laser beam oscillator 1 is changed by a mirror 3a, the excimer laser beam 2 is formed to a desired size by a beam expander 4, its optical axis is changed by a mirror 3b, and the excimer laser beam 2 reaches a mask 12 through a field lens 6. And, the excimer laser beam 2 is split into an excimer laser beam 24 to be reflected on the mask pattern part of a mask 12 and an excimer laser beam 25 to be transmitted through the synthetic quartz substrate of the mask 12. The optical axis of the excimer laser beam 24 reflected on the mask 12 is changed, the excimer laser beam 24 is led to an image-formation optics system 7, then an object 9 to be worked is irradiated to work the object 9. Also, the excimer laser beam 25 transmitted through the mask 12 is absorbed to a damper 11 for laser beam. |
