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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH07102373(A)
申请公布日期
1995.04.18
申请号
JP19930268036
申请日期
1993.09.30
申请人
SONY CORP
发明人
YAMAGUCHI NOBUHIRO
分类号
C23C14/50;H01L21/203;(IPC1-7):C23C14/50
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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