发明名称 |
Particle monitor for loadlock soft pump lines |
摘要 |
An apparatus and a method provide a particle monitor mounted in an exhaust line of a loadlock chamber. The apparatus of the present invention comprises a particle monitor and a particle filter mounted down stream from the particle monitor away from the loadlock chamber. In one embodiment, the particle filter can be implemented by a wire-mesh screen, or a perforated stainless steel screen. The particle filter can be mounted in a centering ring of a standard vacuum connection which comprises two flanges, a centering ring, and an O-ring held together by a clamp.
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申请公布号 |
US5406830(A) |
申请公布日期 |
1995.04.18 |
申请号 |
US19930062655 |
申请日期 |
1993.05.14 |
申请人 |
HIGH YIELD TECHNOLOGY |
发明人 |
BORDEN, PETER G.;ELZINGRE, MARTIN D. |
分类号 |
G01N33/00;(IPC1-7):G01N33/00 |
主分类号 |
G01N33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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