发明名称 MICROMACHINED FILTERS AND FLOW REGULATORS
摘要 <p>The fluid filters and fluid flow regulators are capable of accurately handling substantially continuous fluid flow rates as low as about 0.01 cc/day. The filters and flow regulators are so miniaturized, corrosion-resistant and non-toxic that they are suitable for being implanted in the human body; and are capable of being mass produced at costs so low, by using micromachining techniques, such as etching, that they may be considered to be disposable. The filters and flow regulators are passive devices which consume no electrical energy at all. The filters and flow regulators are reliable because they may have as few as only two parts, only one which is a moving part; and because they may handle fluids at very low pressures.</p>
申请公布号 WO1995009988(A1) 申请公布日期 1995.04.13
申请号 US1994011186 申请日期 1994.10.03
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