Process for planarizing the surfaces of semiconductors.,申请号EP19890100359-传众专利搜索

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发明名称	Process for planarizing the surfaces of semiconductors.
摘要
申请公布号	EP0325939(B1)	申请公布日期	1995.04.12
申请号	EP19890100359	申请日期	1989.01.11
申请人	TEMIC TELEFUNKEN MICROELECTRONIC GMBH	发明人	GELLRICH, NORBERT, DR.RER.NAT.
分类号	H01L21/3105;H01L21/311;(IPC1-7):H01L21/31;H01J37/32	主分类号	H01L21/3105
代理机构		代理人
主权项
地址

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