DEVICE AND METHOD FOR FORMING A MICROWAVE PLASMA

摘要

Device for forming a microwave plasma comprising an ionizing chamber wherein a gas can be introduced so as to undergo excitation induced by the presence of a high frequency alternating electric field produced by a plurality of metal antennas. The device of the invention comprises a gas-free volume (4) wherein the metal antennas (5) are arranged parallel to one another and are distributed at the nodes of a regular plane array, an end of each antenna extending from said gas-free volume (4) in the ionizing chamber (1), an induction loop (10) producing microwaves in the gas-free volume (4). The invention also relates to a method for forming a microwave plasma.