Kontrolle eines Verfahrens zur Abscheidung eines dünnen Filmes mittels Plasma.,申请号DE19883851281T-传众专利搜索

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发明名称	Kontrolle eines Verfahrens zur Abscheidung eines dünnen Filmes mittels Plasma.
摘要
申请公布号	DE3851281(T2)	申请公布日期	1995.04.13
申请号	DE19883851281T	申请日期	1988.07.13
申请人	THE BOC GROUP, INC., MONTVALE, N.J., US	发明人	FELTS, JOHN T, ALAMEDA, CA 94501, US;LOPATA, EUGENE S., FREEMONT, CA 94536, US
分类号	C23C16/50;C23C14/00;C23C14/54;C23C16/52;(IPC1-7):C23C14/22;C23C14/34;C23C16/44;G01N21/00	主分类号	C23C16/50
代理机构		代理人
主权项
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