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发明名称
Method of producing CVD silicon oxynitride film.
摘要
申请公布号
EP0481706(B1)
申请公布日期
1995.04.12
申请号
EP19910309441
申请日期
1991.10.15
申请人
KAWASAKI STEEL CORPORATION
发明人
SATO, NOBUYOSHI, C/O KAWASAKI STEEL CORPORATION
分类号
H01L21/318;C23C16/30;H01L21/314;(IPC1-7):H01L21/314
主分类号
H01L21/318
代理机构
代理人
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