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发明名称
CLEANING SOLVENT AND METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH0794458(A)
申请公布日期
1995.04.07
申请号
JP19930234600
申请日期
1993.09.21
申请人
NEC CORP
发明人
SHIROMIZU YOSHIMI
分类号
C11D7/32;H01L21/304;H01L21/306;(IPC1-7):H01L21/304
主分类号
C11D7/32
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