| 摘要 |
PURPOSE:To make it possible to surely and easily sense with an optical sensor used for positioning, etc., of a substrate installed on the glass surface side of the substrate by forming a region having high reflectivity in the peripheral part of the substrate. CONSTITUTION:A glass substrate 1 is mounted on a glass substrate holding jig 2 having holding parts 3 in both end parts of the glass substrate 1. A shielding part 4 having the distance from the glass substrate 1 increasing from the end toward the central part of the holding parts 3 of the glass substrate 1 is mounted at this glass substrate holding jig 2. The film thickness of an antireflection film 5 consisting of chromium oxide decreases gradually in the parts of the holding parts 3 if the chromium oxide film which is the antireflection film 5 is formed. Further, a light shielding film 6 of the thickness gradually decreasing toward the ends is formed if the light shielding film 6 consisting of metal chromium is formed. The exact position of the substrate is easily detected by the optical sensor on the display surface side of the substrate if the region of the increasing reflectivity is formed at the ends of the substrate in such a manner. |
