LIQUID CRYSTAL DISPLAY DEVICE AND ITS PRODUCTION

摘要

PURPOSE:To eliminate the disconnection of gate drawing out electrodes by arranging gate insulating films having excellent moisture resistance and the same metallic films as source and drain electrodes on the circumferences of these drawing out electrodes. CONSTITUTION:Silicon semiconductor layers and interlayer insulating films for channel protection are formed on the upper parts of the gate electrodes. The channel protective films on the gate electrodes are patterned and n<+> silicon films are formed. The n<+> silicon films and the silicon semiconductor layers are patterned. Transparent conductive films of ITO are then formed in the positions where pixel electrodes are formed. These films are then patterned. The films of Ti and Al are formed as second metallic films to constitute the source and drain electrodes of TFTs. The metallic films 13 are patterned to allow the metallic films 13 to remain respectively in the outer peripheral parts of the source and drain electrodes and drawing out electrodes 1a of the TFTs. Films of SiNx are formed as insulating protective films. Further, the films of the resist are formed in the specific parts of the insulating protective films and are dry etched to pattern form the insulating protective films and the gate insulating films.