LIGHTING DEVICE AND ALIGNER HAVING SAME

摘要

PURPOSE:To expand lighting region without increasing the size of a focusing optical system by providing a deflection means and a parabolic reflection surface in one piece on a surface where light is applied to so that they can rotate around the rotary axis which passes through the deflection means and is in parallel with the main rays of electromagnetic wave from a focusing means. CONSTITUTION:X rays from a light source 10 are deflected by a plane mirror 11 and then reach an integrator mirror 20 which is inclined at a specific angle for the advance direction of X rays. The x rays emitted from the integrator mirror 20 reach a paraboloid mirror 30 at a specific radiation angle. In an X-ray aligner the integrator mirror 20 and the paraboloid mirror 30 as deflection means are supported in one piece by a supporting member. Then, the supporting member is provided so that it can rotate around a rotary axis Ax20 which is in parallel with the main rays which pass through the integrator mirror 20 and are from the paraboloid mirror 30.