| 摘要 |
<p>PURPOSE:To make a high-resistance layer hardly formed at the boundary between a conductor and a transparent electrode, to make the hard carbon film on this conductor film hardly peeled and to attain a higher yield, lower cost and higher reliability by disposing a third conductor between the conductor connected to the transparent electrode and the transparent electrode. CONSTITUTION:A transparent conductive thin film to constitute the transparent electrode 1 is deposited by evaporation on a substrate consisting of glass, etc., and in succession, the film of the third conductor 2 is formed on the transparent electrode 1. The third conductor 2 and the transparent conductive thin film to constitute the transparent electrode 1 are then successively etched by using the same mask, and thereafter, the conductive thin film to constitute the first conductor 3 is so formed as to cover the transparent electrode 1 and the third conductor 2. The conductive thin film to constitute the third conductor 3 is patterned to be a prescribed patterns shape. An insulating layer 4 consisting of the hard carbon film is then formed and after the conductive thin film to constitute the second conductor is formed on this insulating layer 4, the conductive thin film to constitute the second conductor 5 is etched. Finally, the unnecessary parts of the insulating layer 4, the first conductor 3 and the third conductor 2 are successively etched by using the same mask to expose the transparent electrodes 1.</p> |
