| 摘要 |
PURPOSE:To provide an optical waveguide structure which can function as an active element by receiving an external factor exclusive of heat at a plane optical waveguide. CONSTITUTION:A buffer layer 2, a core layer 3 and an overclad layer 4 are laminated on an optical waveguide substrate 1 and this core layer 3 is patterned to be a straight shape. The rear surface of this substrate 1 is partly formed as a thin layer along the stretching direction of the core layer 3. The substrate 1 partly formed as the thin layer and the buffer layer 2, core layer 3 and overclad layer 4 existing in the upper part thereof are formed as a rectangular parallelepiped having its one end 1A as a base and is disconnected from the substrate at the other remaining three surfaces. This disconnected rectangular parallelepiped part constitutes a cantilever L having its one end 1A as a fulcrum. |
