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经营范围
发明名称
SURFACE TREATING DEVICE
摘要
申请公布号
JPH0794466(A)
申请公布日期
1995.04.07
申请号
JP19930233898
申请日期
1993.09.20
申请人
TOSHIBA CORP
发明人
MITSUI TADASHI;SEKINE MAKOTO;HORIOKA KEIJI
分类号
H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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