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发明名称
COOLING UNIT FOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH0794648(A)
申请公布日期
1995.04.07
申请号
JP19930239371
申请日期
1993.09.27
申请人
HITACHI LTD
发明人
TANAKA TAKEO;OHASHI SHIGEO;SHIN TAKAYUKI
分类号
H01L23/473;(IPC1-7):H01L23/473
主分类号
H01L23/473
代理机构
代理人
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地址
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