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发明名称
ETCHING APPARATUS OF SEMICONDUCTOR
摘要
申请公布号
JPH0794486(A)
申请公布日期
1995.04.07
申请号
JP19930255259
申请日期
1993.09.20
申请人
KOKUSAI ELECTRIC CO LTD
发明人
SATO OSAMU
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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