MANUFACTURE OF LIGHT EMITTING DEVICE

摘要

PURPOSE:To manufacture a light emitting device whose luminance is not declined in a high humidity environment by a method wherein a protective film whose main component is aluminum oxide are formed on the upper surface and side surfaces of an Al GaAs chip. CONSTITUTION:The p-type layer 12 side surface of an Al GaAs chip 10 is stuck on an adhesive sheet 30 and the chip 10 is subjected to a dipping treatment in ammonia-hydrogen peroxide system solution containing ammonia and hydrogen peroxide to form a primary protective film 20. The Al GaAs chip 10 with the adhesive sheet 30 is left under a room temperature for natural drying. After the drying is finished, the chip 10 is subjected to a dipping treatment in ammonia-hydrogen peroxide system solution containing ammonia and hydrogen peroxide to form a secondary protective film 21 while the p-type layer 12 side surface of the Al GaAs chip 10 is stuck on the adhesive sheet 30. With these treatments, a fine and uniform protective film 22 whose thickness is sufficiently large on the p-type layer 12 side and the n-type layer 11 side is formed on the upper surface and side surfaces of the A-l GaAs chip 10. With this constitution, a light emitting device whose luminance is not declined in a high humidity environment can be manufactured.