Trockenätzverfahren.,申请号DE19883852230T-传众专利搜索

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发明名称	Trockenätzverfahren.
摘要
申请公布号	DE3852230(T2)	申请公布日期	1995.04.06
申请号	DE19883852230T	申请日期	1988.07.15
申请人	HITACHI, LTD., TOKIO/TOKYO, JP	发明人	TACHI, SHINICHI, SAYAMA-SHI SAITAMA, JP;TSUJIMOTO, KAZUNORI, HIGASHIYAMATO-SHI TOKYO, JP;OKUDAIRA, SAKAYUKI, OME-SHI TOKYO, JP
分类号	H01L21/3205;H01L21/302;H01L21/3065;H01L21/311;H01L21/3213;(IPC1-7):H01L21/31;H01L21/306	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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