Träger für Röntgenmaske, Röntgenmaske und Röntgenbelichtungsverfahren mit dieser Maske.

摘要

An X-ray mask support member comprises a support frame, and a support membrane which is held which is thereon and comprises X-ray-transmissive membranes laminated in multi-layers. The support membrane comprises and holds between the multi-layers at least one layer of a transmissive membrane T having an electrical resistivity of 1 x 10<-><4> OMEGA .cm or less.