发明名称 GAS LASER APPARATUS
摘要 <p>A gas laser apparatus is operated in such a manner that gas supplied to a laser chamber is excited for laser oscillation. A cabinet (11) housing gas containers (12 and 13) is located adjacent to the laser oscillator (1) or integrated with it. The piping for the laser gas is incorporated in the cabinet. Such a structure realizes an economical laser of stabilized performance and easy maintenance.</p>
申请公布号 WO1995009460(P1) 申请公布日期 1995.04.06
申请号 JP1994001600 申请日期 1994.09.28
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