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发明名称
Vorrichtung zur Ziehung von Einkristallstangen.
摘要
申请公布号
DE68921442(D1)
申请公布日期
1995.04.06
申请号
DE19896021442
申请日期
1989.12.12
申请人
SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP
发明人
IWASAKI, ATSUSHI, TAKEFU-SHI FUKUI-KEN, JP
分类号
C30B15/00;C30B27/00;C30B29/06;H01L21/208;(IPC1-7):C30B15/00
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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